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MEMS-based Circuits and Systems for Wireless Communication
1;Preface;5
2;Contents;7
3;Contributors;9
4;Acronyms;11
5;Part I NEMS/MEMS Devices;13
5.1;Chapter
1 Thin-Film Bulk Acoustic Wave Resonators;14
5.1.1;1.1 Introduction;14
5.1.1.1;1.1.1 Thin-Film Bulk Ac... |
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